CUSTOM PRODUCTS
Onda Sonics Custom Products
Many standard products originate from a “custom” request. Please inquire if your measurement needs are not fully met. Some examples of our development projects include:
Cavitation Sensor Arrays
Shrinking process windows for advanced megasonic photomask cleaning are demanding a zero-defect process requirement. To correlate acoustic parameters with cleaning performance, an in-situ measurement of the acoustic field is required. Wired cavitation sensor arrays are being developed to understand how cavitation behaves with frequency, generator power, and transducer distance. Meanwhile, wireless cavitation sensor arrays can characterize the dynamic effects of the mask rotation, transducer arm speed, and exposure time.
Cavitation Monitoring Sensors
“Check sensors” are designed to monitor the acoustic output from nozzle and skirt transducers used for single wafer and photomask cleaning processes. When connected with the MCT meters, digital logging allows immediate detection of any process excursions.
Hydrophone Scanning System
Automate scanners can map the tank uniformity with higher productivity than manual movements, allowing high resolution measurements to be made. With a small HCT shaft diameter (3 mm), two-dimensional acoustic plots can be acquired in “loaded” configurations to simulate actual conditions in the cleaning process (e.g., between substrates for semiconductors, data storage, and related applications).
NPL CaviMeterTM
The novel cavitation detector developed by National Physical Laboratory (NPL) is designed to measure both the broadband acoustic signal generated from cavitation and the direct field at the drive frequency in the ultrasonic cleaning tank. The hollow cylindrical shaped CaviSensor is constructed where both the HF and LF signals are separated, and then processed by the CaviMeter to quantify both the level of cavitation and direct field pressure. While the availability of the CaviMeter is limited, the MCT meters rely on the same measurement principles.
